Computational Modeling in Semiconductor Processing

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Computational Modeling in Semiconductor Processing

ISBN10: 0890067074

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Computational Modeling in Semiconductor Processing

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title Computational Modeling in Semiconductor Processing
authors M. Meyyappan
publisher Artech House Publishers
publishedDate 1995
description This book provides you with in-depth coverage of the models, governing equations, and numerical techniques suitable for process simulation -- so you can give your designs the competitive edge. You will understand the basic principles of transport phenomena, gas phase, and surface reactions in electronics material processing, and learn practical numerical techniques used in process simulations.
pageCount 363
printType BOOK
categories Technology & Engineering
maturityRating NOT_MATURE
language en
canonicalVolumeLink https://books.google.com/books/about/Computational_Modeling_in_Semiconductor.html?hl=&id=EwhTAAAAMAAJ

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